Invention Grant
- Patent Title: Piezoelectric material, piezoelectric device including the piezoelectric material, and method of manufacturing the piezoelectric material
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Application No.: US15804105Application Date: 2017-11-06
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Publication No.: US10910551B2Publication Date: 2021-02-02
- Inventor: Jin S. Heo , Kyunghoon Cho , Shashank Priya , Yongke Yan
- Applicant: Samsung Electronics Co., Ltd. , Virginia Tech Intellectual Properties, Inc.
- Applicant Address: KR Suwon-si; US VA Blacksburg
- Assignee: Samsung Electronics Co., Ltd.,Virginia Tech Intellectual Properties, Inc.
- Current Assignee: Samsung Electronics Co., Ltd.,Virginia Tech Intellectual Properties, Inc.
- Current Assignee Address: KR Suwon-si; US VA Blacksburg
- Agency: Cantor Colburn LLP
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/35 ; H01L41/318
Abstract:
A piezoelectric material includes a first material layer including a polycrystalline lead zinc niobate-lead zirconate titanate material arranged in a 001 crystal direction; and a second material layer including a mono-crystalline material having a 001 crystal face, wherein the lead zinc niobate-lead zirconate titanate and the mono-crystalline material are different. Also a piezoelectric device including the piezoelectric material.
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