Invention Grant
- Patent Title: Plating apparatus and plating method
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Application No.: US16174103Application Date: 2018-10-29
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Publication No.: US10914019B2Publication Date: 2021-02-09
- Inventor: Shao Hua Chang , Yasuyuki Masuda , Jumpei Fujikata , Masashi Shimoyama , Tsutomu Nakada
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- Priority: JP2017-210618 20171031
- Main IPC: C25D21/10
- IPC: C25D21/10 ; C25D17/00

Abstract:
A plating apparatus for plating a substrate is provided to reduce vibration of a paddle. The plating apparatus includes a plating bath configured to accommodate plating solution; a paddle that is arranged in the plating bath, and configured to move in a reciprocating direction along a surface of the substrate to stir the plating solution; a support member for supporting a first end portion of the paddle; a first magnet provided on the paddle; and a second magnet provided on the plating bath. The first magnet and the second magnet are configured to exert a magnetic force on each other so that a second end portion on an opposite side to the first end portion of the paddle is suppressed from vibrating in directions approaching and leaving the substrate while the paddle is moving.
Public/Granted literature
- US20190127875A1 PLATING APPARATUS AND PLATING METHOD Public/Granted day:2019-05-02
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