- Patent Title: System and method for drying and analytical testing of containers
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Application No.: US16255923Application Date: 2019-01-24
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Publication No.: US10914521B2Publication Date: 2021-02-09
- Inventor: Matthew David Bernard , Wayne Thomas McDermott , Allison Barbeau Hopkins , Joseph J. Siemer , Michael Altschul Pingitore
- Applicant: Versum Materials US, LLC
- Applicant Address: US AZ Tempe
- Assignee: Versum Materials US, LLC
- Current Assignee: Versum Materials US, LLC
- Current Assignee Address: US AZ Tempe
- Agent Lina Yang
- Main IPC: F26B25/22
- IPC: F26B25/22 ; F26B3/00 ; G01N15/06 ; G01N33/00

Abstract:
Embodiments of the present invention provide a system and method to perform drying and testing of organometallic and organosilane precursor source ampoules that have been cleaned for re-use. The drying and quality control testing is performed in a single location with a single apparatus requiring only one manual connection/disconnection step of the ampoule to the apparatus. The testing includes analyses for residual moisture, entrained particulate matter, differential pressure, and helium leak checking.
Public/Granted literature
- US20200240709A1 System and Method for Drying and Analytical Testing of Containers Public/Granted day:2020-07-30
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