Invention Grant
- Patent Title: Ultrasensitive thermo-mechanical bolometer
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Application No.: US16449410Application Date: 2019-06-23
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Publication No.: US10914637B2Publication Date: 2021-02-09
- Inventor: Yuxuan Lin , Xiang Ji , Tomas Palacios , Jing Kong
- Applicant: Massachusetts Institute of Technology
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Modern Times Legal
- Agent Robert J. Sayre
- Main IPC: G01J5/20
- IPC: G01J5/20 ; G01B7/16 ; F16K31/00 ; G01J5/08

Abstract:
A thermo-mechanical bolometer includes a substrate and a sensing component mounted on the substrate. The sensing element comprises (a) at least one thermal-actuation component mounted in parallel with the substrate and (b) a strain sensor mounted on the at least one layer of thermal-actuation component. The at least one thermal-actuation component alone or in combination (a) absorbs electromagnetic waves and converts energy from absorbed electromagnetic waves into a change in temperature and (b) converts the change in temperature into a deformation of the at least one layer. The strain sensor comprises a layer of fragments with a gap space between the fragments, wherein the strain sensor senses the deformation or mechanical movement and exhibits a change in electrical resistance in response to the sensed deformation or mechanical movement.
Public/Granted literature
- US20190390950A1 Ultrasensitive Thermo-Mechanical Bolometer Public/Granted day:2019-12-26
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