Invention Grant
- Patent Title: Macro inspection systems, apparatus and methods
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Application No.: US16738022Application Date: 2020-01-09
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Publication No.: US10914686B2Publication Date: 2021-02-09
- Inventor: Matthew C. Putman , John B. Putman , John Moffitt , Michael Moskie , Jeffrey Andresen , Scott Pozzi-Loyola , Julie Orlando
- Applicant: Nanotronics Imaging, Inc.
- Applicant Address: US OH Cuyahoga Falls
- Assignee: Nanotronics Imaging, Inc.
- Current Assignee: Nanotronics Imaging, Inc.
- Current Assignee Address: US OH Cuyahoga Falls
- Agency: DLA Piper LLP (US)
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G02B21/06 ; G02B21/26 ; G02B21/36

Abstract:
The disclosed technology relates to an inspection apparatus that includes a stage configured to retain a specimen for inspection, an imaging device having a field of view encompassing at least a portion of the stage to view a specimen retained on the stage, and a plurality of lights disposed on a moveable platform. The inspection apparatus can further include a control module coupled to the imaging device, each of the lights and the moveable platform. The control module is configured to perform operations including: receiving image data from the imaging device, where the image data indicates an illumination landscape of light incident on the speciment; and automatically modifying, based on the image data, an elevation of the moveable platform or an intensity of one or more of the lights to adjust the illumination landscape. Methods and machine-readable media are also contemplated.
Public/Granted literature
- US20200240925A1 MACRO INSPECTION SYSTEMS, APPARATUS AND METHODS Public/Granted day:2020-07-30
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