Invention Grant
- Patent Title: Method and apparatus for resolution and sensitivity enhanced atomic force microscope based infrared spectroscopy
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Application No.: US16351223Application Date: 2019-03-12
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Publication No.: US10914755B2Publication Date: 2021-02-09
- Inventor: Craig Prater , Kevin Kjoller
- Applicant: Bruker Nano, Inc.
- Applicant Address: US CA Santa Barbara
- Assignee: Bruker Nano, Inc.
- Current Assignee: Bruker Nano, Inc.
- Current Assignee Address: US CA Santa Barbara
- Agency: Boyle Fredrickson S.C.
- Main IPC: G01Q30/02
- IPC: G01Q30/02 ; G01Q60/34 ; G01N21/35 ; G01N21/3563

Abstract:
Methods and apparatus for obtaining extremely high sensitivity chemical composition maps with spatial resolution down to a few nanometers. In some embodiments these chemical composition maps are created using a combination of three techniques: (1) Illuminating the sample with IR radiation than is tuned to an absorption band in the sample; and (2) Optimizing a mechanical coupling efficiency that is tuned to a specific target material; (3) Optimizing a resonant detection that is tuned to a specific target material. With the combination of these steps it is possible to obtain (1) Chemical composition maps based on unique IR absorption; (2) spatial resolution that is enhanced by extremely short-range tip-sample interactions; and (3) resonant amplification tuned to a specific target material. In other embodiments it is possible to take advantage of any two of these steps and still achieve a substantial improvement in spatial resolution and/or sensitivity.
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