Invention Grant
- Patent Title: Inspection jig provided with probe, substrate inspection device provided with same, and method for manufacturing inspection jig
-
Application No.: US16319827Application Date: 2017-07-20
-
Publication No.: US10914758B2Publication Date: 2021-02-09
- Inventor: Hidekazu Yamazaki , Norihiro Ota
- Applicant: Nidec-Read Corporation
- Applicant Address: JP Kyoto
- Assignee: Nidec-Read Corporation
- Current Assignee: Nidec-Read Corporation
- Current Assignee Address: JP Kyoto
- Agency: JCIPRNET
- Priority: JP2016-148742 20160728
- International Application: PCT/JP2017/026276 WO 20170720
- International Announcement: WO2018/021140 WO 20180201
- Main IPC: G01R1/073
- IPC: G01R1/073 ; G01R3/00 ; G01R31/26 ; G01R31/28

Abstract:
This inspection jig is provided with: an inspection-side support member having a counter plate (51) provided with a facing surface (F) disposed to face the substrate; and an electrode-side support member (6) having supporting plates (61-63) disposed to face an electrode plate (9) located on the side opposite to the facing surface (F) of the counter plate (51) A probe supporting hole (23), into and by which the rear end portion of the probe (Pr) is inserted and supported, is provided in the supporting plates (61-63), and the probe supporting hole (23) is provided with a restricting surface which is formed along a supporting line (V) inclined at a certain angle (θ) with respect to a reference line (Z), and which restricts the rear end portion of the probe (Pr) from moving in the direction perpendicular to the inclined direction of the supporting line (V).
Public/Granted literature
Information query