Invention Grant
- Patent Title: Optical sensor and method for forming the same
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Application No.: US16235871Application Date: 2018-12-28
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Publication No.: US10915727B2Publication Date: 2021-02-09
- Inventor: Hsin-Hui Lee , Han-Liang Tseng , Hsueh-Jung Lin
- Applicant: Vanguard International Semiconductor Corporation
- Applicant Address: TW Hsinchu
- Assignee: Vanguard International Semiconductor Corporation
- Current Assignee: Vanguard International Semiconductor Corporation
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: G06K9/00
- IPC: G06K9/00 ; H01L27/146 ; G02B27/30

Abstract:
An optical sensor includes a substrate and a light collimating layer. The substrate includes a sensor pixel array having a plurality of sensor pixels. The light collimating layer is disposed on the substrate. The light collimating layer includes a patterned seed layer, a plurality of transparent pillars, a metal layer, and a mask layer. The patterned seed layer is disposed on the substrate. The patterned seed layer exposes the sensor pixel array. The transparent pillars are disposed on the sensor pixel array. The metal layer is disposed on the patterned seed layer and in between the transparent pillars. The mask layer is disposed on the metal layer.
Public/Granted literature
- US20200210669A1 OPTICAL SENSOR AND METHOD FOR FORMING THE SAME Public/Granted day:2020-07-02
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