Invention Grant
- Patent Title: Feedthrough device and signal conductor path arrangement
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Application No.: US16744069Application Date: 2020-01-15
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Publication No.: US10916362B2Publication Date: 2021-02-09
- Inventor: Johannes Petrus Sprengers , Christiaan Otten
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- Main IPC: H01B17/30
- IPC: H01B17/30 ; G02B6/44 ; H01J37/32 ; H02G3/22 ; G02B6/42 ; G02B6/38

Abstract:
Feedthrough device (50; 150), for forming a hermetic seal around signal conductors in a signal conductor group (60; 160) with a group width. The device comprises a slotted member (52; 152) and a base (62; 162). The base defines a through hole (65) that extends entirely through the 5 base along a feedthrough direction (X), and is adapted to accommodate the slotted member. The slotted member defines first and second surfaces (53, 54; 153, 154) on opposite sides associated with the feedthrough direction, and a side surface (55, 56; 155, 156) facing transverse to the feedthrough direction. The slotted member comprises a slot (58; 158), which extends along the feedthrough direction through the slotted member, and opens into the first and second surfaces and 10 into a longitudinal opening (59; 159) along the side surface. The slot extends transversely into the slotted member up to a slot depth at least equal to the signal conductor group width.
Public/Granted literature
- US20200176151A1 FEEDTHROUGH DEVICE AND SIGNAL CONDUCTOR PATH ARRANGEMENT Public/Granted day:2020-06-04
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