Invention Grant
- Patent Title: Semiconductor device and manufacturing method therefor, solid-state imaging element, and electronic equipment
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Application No.: US16477963Application Date: 2018-01-10
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Publication No.: US10916538B2Publication Date: 2021-02-09
- Inventor: Hiroshi Takahashi
- Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Sheridan Ross P.C.
- Priority: JP2017-010053 20170124
- International Application: PCT/JP2018/000232 WO 20180110
- International Announcement: WO2018/139188 WO 20180802
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L21/768 ; H01L23/48 ; H01L25/00 ; H01L27/146

Abstract:
The present technology relates to a semiconductor device and a manufacturing method therefor, a solid-state imaging element and electronic equipment that make it possible to suppress breakdown of a side wall insulating film by charge damage to suppress short-circuiting. The semiconductor device according to an aspect of the present technology includes a first semiconductor substrate on which a given circuit is formed, a second semiconductor substrate, and through electrodes that electrically connect the first semiconductor substrate and the second semiconductor substrate to each other. The through electrode is formed such that a through-hole is opened through a protection diode structure formed in the first semiconductor substrate, an insulating film is deposited on a side wall of the through-hole, and an electrode material is then filled inside the through-hole in which the insulating film is deposited. The present technology can be applied, for example, to a CMOS image sensor.
Information query
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