Invention Grant
- Patent Title: Memory cell structure
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Application No.: US16665095Application Date: 2019-10-28
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Publication No.: US10916551B2Publication Date: 2021-02-09
- Inventor: Jhon Jhy Liaw
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L23/522 ; H01L23/528 ; H01L27/02 ; G11C11/412

Abstract:
Provided is a method of forming a memory cell including a rectangular shaped via for at least one Vss node connection. In some embodiments, the rectangular shaped via has a length/width of greater than 1.5. The rectangular shaped via may be disposed on the Via0 and/or Via1 layer interfacing a first metal layer (e.g., M1). The memory cell may also include circular/square shaped vias having a length/width of between approximately 0.8 and 1.2. The circular/square shaped vias may be coplanar with the rectangular shaped vias.
Public/Granted literature
- US20200058657A1 MEMORY CELL STRUCTURE Public/Granted day:2020-02-20
Information query
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