Invention Grant
- Patent Title: Non-volatile memory device
-
Application No.: US16411307Application Date: 2019-05-14
-
Publication No.: US10916562B2Publication Date: 2021-02-09
- Inventor: Takashi Ishida , Yoshiaki Fukuzumi , Takayuki Okada , Masaki Tsuji
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L27/11582 ; H01L27/11565 ; H01L27/1157 ; H01L29/10 ; H01L29/423

Abstract:
According to an embodiment, a non-volatile memory device includes first electrodes stacked on an underlying layer, a second electrode provided on the first electrodes, a semiconductor layer extending in a first direction from the underlying layer to the second electrode, and a memory film provided between each of the first electrodes and the semiconductor layer. The semiconductor layer includes a first portion adjacent to the first electrodes and a second portion adjacent to the second electrode. The second portion has a thickness thinner than a thickness of the first portion in a second direction perpendicular to the first direction.
Public/Granted literature
- US20190267398A1 NON-VOLATILE MEMORY DEVICE Public/Granted day:2019-08-29
Information query
IPC分类: