Invention Grant
- Patent Title: Assemblies having vertically-extending structures, and methods of forming assemblies having vertically-extending channel material pillars
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Application No.: US16866236Application Date: 2020-05-04
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Publication No.: US10916564B2Publication Date: 2021-02-09
- Inventor: David Ross Economy , John Mark Meldrim , Haoyu Li , Yongjun Jeff Hu , Christopher W. Petz , Daniel Billingsley , Everett A. McTeer
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556 ; H01L27/11519 ; H01L21/311 ; H01L27/11565 ; H01L21/768 ; H01L27/1157

Abstract:
Some embodiments include an assembly which has channel material pillars, and which has memory cells along the channel material pillars. A conductive structure is under the channel material pillars. The conductive structure has doped semiconductor material in direct contact with bottom regions of the channel material pillars. One or more of magnesium, scandium, yttrium and lanthanide elements is along the bottom regions of the channel material pillars. Some embodiments include methods of forming assemblies. A structure is formed, and a mass is formed against an upper surface of the structure. Plugs are formed within openings in the mass. The plugs comprise a second material over a first material. The first material includes one or more of magnesium, scandium, yttrium and lanthanide elements. Openings are formed to terminate on the first material, and are then extended through the first material. Channel material pillars are formed within the openings.
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