Invention Grant
- Patent Title: Imaging device, method of manufacturing the same, and apparatus
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Application No.: US16275652Application Date: 2019-02-14
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Publication No.: US10916574B2Publication Date: 2021-02-09
- Inventor: Takahiro Suzuki , Yoshiei Tanaka , Tsutomu Tange , Katsunori Hirota
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JP2018-044665 20180312,JP2018-217521 20181120
- Main IPC: H01L27/146
- IPC: H01L27/146
Abstract:
An imaging device includes a substrate including a photoelectric conversion portion and an insulating layer formed to cover at least a part of the photoelectric conversion portion. The insulating layer contains silicon, nitrogen, and chlorine. In an embodiment, in at least a part of the insulating layer, a ratio of silicon atoms bonded to one, two, or three nitrogen atoms and not bonded to an oxygen atom is not more than 20% in silicon atoms contained in at least the part.
Public/Granted literature
- US20190280023A1 IMAGING DEVICE, METHOD OF MANUFACTURING THE SAME, AND APPARATUS Public/Granted day:2019-09-12
Information query
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