Invention Grant
- Patent Title: Piezoelectric element and piezoelectric element-based device
-
Application No.: US15920829Application Date: 2018-03-14
-
Publication No.: US10916693B2Publication Date: 2021-02-09
- Inventor: Takayuki Yonemura , Chikara Kojima , Xiaoxing Wang , Tetsuya Isshiki , Yasuhiro Itayama
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2017-058613 20170324
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/09 ; H01L41/047 ; C01G25/00 ; A61B8/00 ; A61B8/14 ; B41J2/14 ; B41J2/16 ; G01N29/24 ; H01L41/04 ; H01L41/08 ; B06B1/06 ; H01L41/47

Abstract:
A piezoelectric element has a diaphragm, a first electrode on the diaphragm, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric layer. The piezoelectric layer is a stack of multiple piezoelectric films and is made of a perovskite composite oxide containing lead, zirconium, and titanium and represented by the general formula ABO3, with the molar ratio of the A-site to the B-site (A/B) in the perovskite composite oxide being 1.14 or more and 1.22 or less. In current-time curve measurement, the activation energy calculated from relaxation current using an Arrhenius plot is 0.6 [eV] or less. The relaxation current is the amount of current at the time at which a downward trend in current turns upward.
Public/Granted literature
- US20180277742A1 PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC ELEMENT-BASED DEVICE Public/Granted day:2018-09-27
Information query
IPC分类: