Invention Grant
- Patent Title: Resistive memory crossbar array employing selective barrier layer growth
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Application No.: US16671425Application Date: 2019-11-01
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Publication No.: US10916699B2Publication Date: 2021-02-09
- Inventor: Takashi Ando , Chih-Chao Yang , Lawrence A. Clevenger
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P. C.
- Agent Randall Bluestone
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; H01L21/768 ; G11C13/00 ; H01L23/532

Abstract:
A method is presented for protecting resistive random access memory (RRAM) stacks within a resistive memory crossbar array. The method includes forming a plurality of conductive lines within an interlayer dielectric (ILD), forming a barrier layer over at least one conductive line of the plurality of conductive lines, the barrier layer directly contacting an entire upper surface of the at least one conductive line, and forming a RRAM stack including a bottom electrode, a high-k dielectric layer, and a top electrode over the barrier layer.
Public/Granted literature
- US20200066983A1 RESISTIVE MEMORY CROSSBAR ARRAY EMPLOYING SELECTIVE BARRIER LAYER GROWTH Public/Granted day:2020-02-27
Information query
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