Invention Grant
- Patent Title: Microelectromechanical and/or nanoelectromechanical structure with electrothermal actuation comprising at least two differently polarisable actuating beams
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Application No.: US15297243Application Date: 2016-10-19
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Publication No.: US10917026B2Publication Date: 2021-02-09
- Inventor: Guillaume Jourdan , Guillaume Lehee
- Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives , SAFRAN ELECTRONICS & DEFENSE
- Applicant Address: FR Paris; FR Boulogne Billancourt
- Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives,SAFRAN ELECTRONICS & DEFENSE
- Current Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives,SAFRAN ELECTRONICS & DEFENSE
- Current Assignee Address: FR Paris; FR Boulogne Billancourt
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1560045 20151021
- Main IPC: H02N10/00
- IPC: H02N10/00 ; B81B3/00
Abstract:
A microelectromechanical structure with electrothermal actuation including a fixed part, a moveable part, a first electrothermal actuating beam enabling an electric current to flow from the fixed part to the moveable part and a second electrothermal actuating beam enabling an electric current to flow from the fixed part to the moveable part, the beams being mechanically connected to the moveable part enabling a displacement of the moveable part by electrothermal actuation, an electrically conductive connecting element connecting the moveable part to the fixed part, a first connector for connecting the first actuating beam to a first polarisation source and a second connector for connecting the second actuating beam to a second polarisation source, such that the first and the second can be polarised differently and separately.
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