Vacuum pump and pump-integrated power source device
Abstract:
A vacuum pump includes a pump device including a pump motor, an exhaust function section configured to exhaust sucked gas, and at least two direct current heaters, and a pump-integrated power source device. The pump-integrated power source device includes a pump control section, a pump power source configured to supply power to the pump control section, a direct current heater control section configured to control the two direct current heaters, and a direct current heater power source configured to supply power to the direct current heater control section.
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