Invention Grant
- Patent Title: Flow sensor, method for manufacturing flow sensor and flow sensor module
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Application No.: US15814036Application Date: 2017-11-15
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Publication No.: US10921169B2Publication Date: 2021-02-16
- Inventor: Tsutomu Kono , Yuuki Okamoto , Takeshi Morino , Keiji Hanzawa
- Applicant: Hitachi Automotive Systems, Ltd.
- Applicant Address: JP Hitachinaka
- Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee: Hitachi Automotive Systems, Ltd.
- Current Assignee Address: JP Hitachinaka
- Agency: Crowell & Moring LLP
- Priority: JPJP2009-282085 20091211
- Main IPC: H01L29/84
- IPC: H01L29/84 ; G01F15/16 ; G01F1/684 ; G01F1/692 ; H01L23/495

Abstract:
A flow sensor structure seals the surface of an electric control circuit and part of a semiconductor device via a manufacturing method that prevents occurrence of flash or chip crack when clamping the semiconductor device via a mold. The flow sensor structure includes a semiconductor device having an air flow sensing unit and a diaphragm, and a board or lead frame having an electric control circuit for controlling the semiconductor device, wherein a surface of the electric control circuit and part of a surface of the semiconductor device is covered with resin while having the air flow sensing unit portion exposed. The flow sensor structure may include surfaces of a resin mold, a board or a pre-mold component surrounding the semiconductor device that are continuously not in contact with three walls of the semiconductor device orthogonal to a side on which the air flow sensing unit portion is disposed.
Public/Granted literature
- US20180073905A1 Flow Sensor, Method for Manufacturing Flow Sensor and Flow Sensor Module Public/Granted day:2018-03-15
Information query
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