Invention Grant
- Patent Title: Pressure sensor including protective film to avoid adhesion of foreign material
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Application No.: US16226998Application Date: 2018-12-20
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Publication No.: US10921205B2Publication Date: 2021-02-16
- Inventor: Takeru Kanazawa , Kazuyuki Ono , Shinji Kawano
- Applicant: DENSO CORPORATION
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JPJP2016-164390 20160825
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L19/06

Abstract:
A pressure sensor generates an electrical output according to a fluid pressure in a detection space applied to a diaphragm. The diaphragm is flexibly deformable in a thickness direction. The pressure sensor includes a pressure receiving recess defining the detection space and a protection film covering the pressure receiving recess. The protection film has a corner portion provided in an inner corner area of the pressure receiving recess and a thin film portion having a uniform thickness. The corner portion is located outside the diaphragm in an in-plane direction orthogonal to the thickness direction.
Public/Granted literature
- US20190120709A1 PRESSURE SENSOR Public/Granted day:2019-04-25
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