Invention Grant
- Patent Title: Chamber component part wear indicator and a system for detecting part wear
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Application No.: US15243282Application Date: 2016-08-22
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Publication No.: US10921251B2Publication Date: 2021-02-16
- Inventor: Mats Larsson , Kevin A. Papke
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G01N21/64
- IPC: G01N21/64 ; H01J37/32 ; G01N3/56

Abstract:
The present invention generally relates method and part wear indicator for identifying an eroded chamber component in an etching or other plasma processing chamber. In one embodiment, a chamber component has a part wear indicator. The chamber component has a body. The body has a top surface and a bottom surface. A part wear indicator material is disposed in the chamber component body. The part wear indicator has a body. The body of the part wear indicator has a transparent first layer. A second layer has a tracer material disposed therein and wherein the first layer is closer to the top surface of the top surface than the second layer.
Public/Granted literature
- US20180052104A1 CHAMBER COMPONENT PART WEAR INDICATOR AND A SYSTEM FOR DETECTING PART WEAR Public/Granted day:2018-02-22
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