Apparatus for deflecting and/or modulating laser radiation
Abstract:
An apparatus for deflecting and/or modulating a laser radiation, wherein the laser radiation is a plurality of laser beams. The apparatus comprises a plurality of deflecting elements configured as mirror elements or transparent components, and movement apparatus that is capable of moving the plurality of deflecting elements individually or in groups. The movement apparatus comprises a plurality of piezo actuators which are capable of performing a translatory motion.
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