Invention Grant
- Patent Title: Selective modification method of a base material surface
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Application No.: US16550695Application Date: 2019-08-26
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Publication No.: US10923342B2Publication Date: 2021-02-16
- Inventor: Hitoshi Osaki , Hiroyuki Komatsu
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
A selective modification method of a base material surface includes subjecting at least a part of a surface of a base material to at least one surface treatment selected from the group consisting of an oxidization treatment and a hydrophilization treatment. The base material includes a surface layer and includes an oxide, a nitride or an oxynitride of silicon, or a combination thereof in a first region of the surface layer. A nonphotosensitive composition is applied directly or indirectly on the surface of the base material after the surface treatment. The nonphotosensitive composition includes: a first polymer containing a nitrogen atom; and a solvent. It is preferred that the base material contains a metal in a second region which is other than the first region of the surface layer. In the surface treatment step, an O2 plasma treatment is preferably conducted.
Public/Granted literature
- US20200051813A1 SELECTIVE MODIFICATION METHOD OF A BASE MATERIAL SURFACE Public/Granted day:2020-02-13
Information query
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