Invention Grant
- Patent Title: Method for fabricating an elctro-absorption modulated laser and electro-absorption modulated laser
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Application No.: US16461338Application Date: 2016-11-17
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Publication No.: US10923879B2Publication Date: 2021-02-16
- Inventor: Martin Moehrle , Victor Dolores Calzadilla , Marlene Zander , Francisco Soares
- Applicant: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Applicant Address: DE Munich
- Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee Address: DE Munich
- Agency: Maschoff Brennan
- International Application: PCT/EP2016/078001 WO 20161117
- International Announcement: WO2018/091094 WO 20180524
- Main IPC: H01S5/00
- IPC: H01S5/00 ; H01S5/0625 ; H01S5/02 ; H01S5/042 ; H01S5/343 ; H01S5/12 ; H01S5/22

Abstract:
It is provided a method for fabricating an electroabsorption modulated laser comprising generating a single mode laser section and an electroabsorption modulator section, comprising fabricating at least one n-doped layer of the laser section and at least one n-doped layer of the modulator section; generating an isolating section for electrically isolating at least the n-doped layer of the laser section and the n-doped layer of the modulator section from one another. Generating the isolating section comprises epitaxially growing at least one isolating layer and structuring the isolating layer before the generation of the n-doped layer of the laser section and the n-doped layer of the modulator section.
Public/Granted literature
- US20190326729A1 METHOD FOR FABRICATING AN ELCTRO-ABSORPTION MODULATED LASER AND ELECTRO-ABSORPTION MODULATED LASER Public/Granted day:2019-10-24
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