Invention Grant
- Patent Title: Dual zone common catch heat exchanger/chiller
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Application No.: US16297474Application Date: 2019-03-08
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Publication No.: US10928145B2Publication Date: 2021-02-23
- Inventor: Fernando Silveira , Brad L. Mays
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: F28F27/02
- IPC: F28F27/02 ; H01J37/32 ; F28D21/00

Abstract:
Methods and systems for controlling temperatures in plasma processing chamber via pulsed application of heating power and pulsed application of cooling power. In an embodiment, fluid levels in each of a hot and cold reservoir coupled to the temperature controlled component are maintained in part by a coupling each of the reservoirs to a common secondary reservoir. Heat transfer fluid is pumped from the secondary reservoir to either the hot or cold reservoir in response to a low level sensed in the reservoir. In an embodiment, both the hot and cold reservoirs are contained in a same platform as the secondary reservoir with the hot and cold reservoirs disposed above the secondary reservoir to permit the secondary reservoir to catch gravity driven overflow from either the hot or cold reservoir.
Public/Granted literature
- US20190204032A1 DUAL ZONE COMMON CATCH HEAT EXCHANGER/CHILLER Public/Granted day:2019-07-04
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