Thermal air flow meter
Abstract:
The purpose is to improve the measurement accuracy of a thermal air flow meter. The device has: an auxiliary passage for entraining a portion of a fluid being measured; a sensor chip arranged in the auxiliary passage, for measuring the flow rate of the fluid being measured; an electronic component having an internal resistor, for converting the fluid flow rate detected by the sensor chip to an electrical signal; and a substrate on which the sensor chip and the electronic component are mounted. The substrate is covered by a filler material, on the surface of which the electronic component is mounted.
Public/Granted literature
Information query
Patent Agency Ranking
0/0