Invention Grant
- Patent Title: Atomic force microscope, atomic force microscopy, and controlling method of an atomic force microscopy
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Application No.: US16682124Application Date: 2019-11-13
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Publication No.: US10928417B2Publication Date: 2021-02-23
- Inventor: Nobuaki Sakai
- Applicant: OLYMPUS CORPORATION
- Applicant Address: JP Tokyo
- Assignee: OLYMPUS CORPORATION
- Current Assignee: OLYMPUS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Main IPC: G01Q10/06
- IPC: G01Q10/06 ; G01Q60/24

Abstract:
An atomic force microscope includes a raster scan control mechanism configured to perform a raster scan between a cantilever having a probe at a free end and a sample relative to each other across an XY plane in a fluid, an interaction control mechanism configured to vibrate the cantilever and to control an interaction generated between the probe and the sample, and a sample information acquisition circuit configured to acquire sample information including inclination information of a sample surface with respect to the XY plane based on a control result of the interaction control mechanism. The interaction control mechanism is configured to control the interaction generated between the probe and the sample in accordance with inclination of the sample surface with respect to the XY plane.
Public/Granted literature
- US20200081032A1 ATOMIC FORCE MICROSCOPE, ATOMIC FORCE MICROSCOPY, AND CONTROLLING METHOD OF AN ATOMIC FORCE MICROSCOPY Public/Granted day:2020-03-12
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