Invention Grant
- Patent Title: Microelectromechanical system (MEMS) structure and method of formation
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Application No.: US16008442Application Date: 2018-06-14
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Publication No.: US10928624B2Publication Date: 2021-02-23
- Inventor: Jose A. Martinez
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michelle F. Murray; Charles A. Brill; Frank D. Cimino
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81C1/00 ; B81B7/02 ; G09G3/34
Abstract:
A microelectromechanical system (MEMS) structure includes at least first and second metal vias. Each of the first and second metal vias includes a respective planar metal layer having a first thickness and a respective post formed from the planar metal layer. The post has a sidewall, and the sidewall has a second thickness greater than 14% of the first thickness.
Public/Granted literature
- US20190204586A1 MICROELECTROMECHANICAL SYSTEM (MEMS) STRUCTURE AND METHOD OF FORMATION Public/Granted day:2019-07-04
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