Invention Grant
- Patent Title: Method and device for correcting deformations of a surface and mirror using said method and/or said device
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Application No.: US15782358Application Date: 2017-10-12
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Publication No.: US10928626B2Publication Date: 2021-02-23
- Inventor: Gilles Durand
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: FR1659908 20161013
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H01L41/04 ; H01L41/09 ; G02B7/18 ; G02B26/06 ; G02B27/00

Abstract:
A method for correcting deformations of the surface of an object equipped with a device for correcting deformations, the device including a piezoelectric layer including first and second surfaces, a first plurality of electrical tracks arranged on the first surface, a second plurality of electrical tracks arranged on the second surface, the tracks of the first plurality forming a plurality of lines and the tracks of the second plurality forming a plurality of columns, each column of the plurality of columns being perpendicular to the lines of the plurality of lines, the crossing of a line and a column forming a pixel. The method includes measuring the deformations of the surface; identifying the pixels for correcting the deformations and applying, for each identified pixel, with the line and the column corresponding to the pixel, an electric field greater than the coercive field of the piezoelectric material of the piezoelectric layer.
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