Invention Grant
- Patent Title: Gallidation assisted impurity doping
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Application No.: US16446460Application Date: 2019-06-19
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Publication No.: US10930506B2Publication Date: 2021-02-23
- Inventor: Lars Voss , Daniel Max Dryden , Clint Frye , Sara Elizabeth Harrison , Rebecca J. Nikolic , Qinghui Shao
- Applicant: Lawrence Livermore National Security, LLC
- Applicant Address: US CA Livermore
- Assignee: Lawrence Livermore National Security, LLC
- Current Assignee: Lawrence Livermore National Security, LLC
- Current Assignee Address: US CA Livermore
- Agency: Zilka-Kotab, P.C.
- Main IPC: H01L21/225
- IPC: H01L21/225 ; H01L21/324 ; H01L29/207 ; H01L29/20 ; H01L29/36 ; H01L21/285
Abstract:
In one embodiment, a product includes a structure comprising a material of a Group-III-nitride having a dopant, where a concentration of the dopant in the structure has a concentration gradient characteristic of diffusion of the dopant inward from at least a portion of a surface of the structure in a direction substantially normal to the portion of the surface. The structure has less than 1% decomposition of the Group-III-nitride at the surface of the structure.
Public/Granted literature
- US20190393038A1 GALLIDATION ASSISTED IMPURITY DOPING Public/Granted day:2019-12-26
Information query
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