Invention Grant
- Patent Title: Workpiece stocker with circular configuration
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Application No.: US15954230Application Date: 2018-04-16
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Publication No.: US10930536B2Publication Date: 2021-02-23
- Inventor: Lutz Rebstock
- Applicant: Brooks Automation (Germany) GmbH
- Applicant Address: DE Jena
- Assignee: Brooks Automation (Germany) GmbH
- Current Assignee: Brooks Automation (Germany) GmbH
- Current Assignee Address: DE Jena
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Priority: DE102006028057.1 20060609
- Main IPC: H01L21/677
- IPC: H01L21/677

Abstract:
An improved stocker configuration for storing workpieces in a fabrication facility is disclosed, employing workpiece compartments arranged stationarily around a robot handling assembly. The robot handler can be designed with three degrees of freedom, to improve speed, throughput and minimum particle generation. In addition, the stocker storage area is stationary with the movable components are the robot assembly, thus further contributing to the cleanliness of the storage stocker. The stocker configuration can be open storage area for fast access, space saving and ease of clean air purging. The stocker configuration can provide highly dense workpiece storage, utilizing a circumferential edge gripper robot handling assembly.
Public/Granted literature
- US20190019709A1 WORKPIECE STOCKER WITH CIRCULAR CONFIGURATION Public/Granted day:2019-01-17
Information query
IPC分类: