Invention Grant
- Patent Title: Door opening/closing system, and load port equipped with door opening/closing system
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Application No.: US16774758Application Date: 2020-01-28
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Publication No.: US10930537B2Publication Date: 2021-02-23
- Inventor: Toshihiro Kawai , Yasushi Taniyama , Munekazu Komiya , Takashi Shigeta
- Applicant: SINFONIA TECHNOLOGY CO., LTD.
- Applicant Address: JP Minato-ku
- Assignee: SINFONIA TECHNOLOGY CO., LTD.
- Current Assignee: SINFONIA TECHNOLOGY CO., LTD.
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2015-154594 20150804
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; H01L21/673

Abstract:
Provided are a door opening/closing system which prevents the entry of atmospheric air into a front-opening unified pod (FOUP) and an equipment front end module (EFEM) when the FOUP and the EFEM are placed in communication with each other, and a load port equipped with the door opening/closing system. The door opening/closing system is provided with: a base which constitutes a part of a wall isolating a conveyance space from an external space, an opening portion provided in the base; a door which is capable of opening and closing the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door, a sealed space which is constituted by the base, the first seal member, the second seal member, a lid member, and the door when the container is in a state of contact with the opening portion with the first seal member therebetween, a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit 88 which evacuates the sealed space.
Public/Granted literature
- US20200168495A1 DOOR OPENING/CLOSING SYSTEM, AND LOAD PORT EQUIPPED WITH DOOR OPENING/CLOSING SYSTEM Public/Granted day:2020-05-28
Information query
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