Invention Grant
- Patent Title: Formation of stacked nanosheet semiconductor devices
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Application No.: US16735826Application Date: 2020-01-07
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Publication No.: US10930563B2Publication Date: 2021-02-23
- Inventor: Kangguo Cheng , Juntao Li , Heng Wu , Peng Xu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Randall Bluestone
- Main IPC: H01L21/822
- IPC: H01L21/822 ; H01L21/8238 ; H01L21/84 ; H01L27/12 ; H01L27/092 ; H01L29/08 ; H01L29/775 ; B82Y10/00 ; H01L29/66 ; H01L29/06

Abstract:
A method for fabricating a stacked nanosheet semiconductor device includes forming nanosheet stacks including alternating silicon layers and silicon germanium layers on a substrate. The method includes patterning a gate structure on the nanosheet stacks and forming a source and drain on the stacks. The method further includes growing a first epitaxial layer on the source and drain. The method includes etching an interlayer dielectric on the first epitaxial layer. The method includes etching a portion of the first epitaxial layer forming a channel and growing a second epitaxial layer and etching a portion of the interlayer etching a portion of the first liner, forming a pFET. The method includes forming an nFET. The method includes the pFET and the nFET being disposed adjacent to one another vertically and a drain of the pFET and a drain of the nFET being electrically connected.
Information query
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