Invention Grant
- Patent Title: Multi-direction channel transistor and semiconductor device including the multi-direction channel transistor
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Application No.: US16546506Application Date: 2019-08-21
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Publication No.: US10930740B2Publication Date: 2021-02-23
- Inventor: Hae-in Jung , Moon-young Jeong , Joon Han , Satoru Yamada
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2019-0031473 20190319
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L27/02 ; H01L29/08 ; H01L29/423 ; H01L29/417 ; H01L27/11573 ; H01L27/108 ; H01L21/8234 ; H01L21/306 ; H01L27/11526 ; H01L27/088

Abstract:
Provided are a multi-direction channel transistor having a gate having an increased effective width and a multi-direction channel, and a semiconductor device including the multi-direction channel transistor, wherein the multi-direction channel transistor includes at least one fin on an active region on a substrate and disposed adjacent to a recess extending in a first direction; a gate line extending in a second direction crossing the first direction and covering at least a portion of the at least one fin and the recess; source/drain regions on the active region at both sides of the gate line; and a channel region in the active region under the gate line between the source/drain regions, wherein the first direction is diagonal to the second direction, and a dielectric film under the gate line has substantially the same thickness on both the at least one fin and the recess.
Public/Granted literature
Information query
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