Invention Grant
- Patent Title: Process for manufacturing scalable spin-orbit torque (SOT) magnetic memory
-
Application No.: US16223077Application Date: 2018-12-17
-
Publication No.: US10930843B2Publication Date: 2021-02-23
- Inventor: Satoru Araki
- Applicant: SPIN MEMORY, INC.
- Applicant Address: US CA Fremont
- Assignee: SPIN MEMORY, INC.
- Current Assignee: SPIN MEMORY, INC.
- Current Assignee Address: US CA Fremont
- Agency: Morgan, Lewis & Bockius LLP
- Main IPC: H01L43/14
- IPC: H01L43/14 ; H01L43/06 ; H01L43/04 ; H01L27/22 ; G11C11/16

Abstract:
A method of fabricating a magnetic storage device includes depositing a first conductive material. The method further includes electrically isolating distinct instances of the first conductive material to form a first wire extending along a first direction. The method further includes depositing, on the distinct instances of the first conductive material, a set of device layers. The method further includes electrically isolating distinct instances of the device layers to form spin orbit torque magnetic random access memory (SOT-MRAM) devices positioned on distinct instances of the first conductive material. The method further includes depositing, on the distinct instances of the device layers, a layer of a second conductive material and electrically isolating a plurality of distinct instances of the layer of the second conductive material to form a plurality of second wires extending along a second direction. The second direction is different from the first direction.
Information query
IPC分类: