Invention Grant
- Patent Title: Separation method, display device, display module, and electronic device
-
Application No.: US16842820Application Date: 2020-04-08
-
Publication No.: US10930870B2Publication Date: 2021-02-23
- Inventor: Masakatsu Ohno , Kayo Kumakura , Hiroyuki Watanabe , Seiji Yasumoto , Satoru Idojiri , Hiroki Adachi
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: JPJP2016-149840 20160729
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L27/12 ; H01L27/32 ; H01L51/52 ; H01L29/786
Abstract:
The yield of a separation process is improved. The mass productivity of a display device which is formed through a separation process is improved. A layer is formed over a substrate with use of a material including a resin or a resin precursor. Next, a resin layer is formed by performing heat treatment on the layer. Next, a layer to be separated is formed over the resin layer. Then, the layer to be separated and the substrate are separated from each other. The heat treatment is performed in an atmosphere containing oxygen or while supplying a gas containing oxygen.
Public/Granted literature
- US20200235323A1 SEPARATION METHOD, DISPLAY DEVICE, DISPLAY MODULE, AND ELECTRONIC DEVICE Public/Granted day:2020-07-23
Information query
IPC分类:
