Invention Grant
- Patent Title: Optical apparatus including a cooling device and a gap
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Application No.: US16585035Application Date: 2019-09-27
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Publication No.: US10931083B2Publication Date: 2021-02-23
- Inventor: Oh Kee Kwon , Su Hwan Oh , Chul-Wook Lee , Kisoo Kim
- Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2017-0006421 20170113
- Main IPC: H01S5/125
- IPC: H01S5/125 ; H01S5/024 ; H01S5/026 ; H01S5/12 ; H01S5/065 ; H01S5/0625 ; H01S5/06 ; H01S5/02 ; H01S5/042

Abstract:
An optical apparatus includes a cooling device with a lower clad disposed thereon; a waveguide disposed on the lower clad and including an active waveguide to define a gain section and a passive waveguide to define a wavelength-tunable section; gratings disposed in the lower clad of the wavelength-tunable section; an upper clad disposed on the waveguide; a first upper electrode disposed on the upper clad of the gain section; and a second upper electrode disposed on the upper clad of the wavelength-tunable section. The lower clad of the wavelength-tunable section has a recess region to expose an upper surface of the cooling device, the recess region forming an air gap-having a height of 10 μm to 80 μm from the upper surface of the cooling device. The gratings are formed in a depth of at least 5 μm from a bottom surface of the lower clad of the recess region.
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