Invention Grant
- Patent Title: Rare-earth oxide based chamber material
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Application No.: US16405783Application Date: 2019-05-07
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Publication No.: US10934216B2Publication Date: 2021-03-02
- Inventor: Jennifer Y. Sun , Biraja P. Kanungo
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: C04B35/50
- IPC: C04B35/50 ; C04B35/505 ; C23C14/08 ; C04B35/626 ; C04B37/00 ; C04B37/02 ; H01L21/687 ; C23C16/44 ; H01J37/32 ; C23C4/11 ; C23C4/134 ; C04B35/622 ; C23C16/40 ; H01L21/67 ; H01L21/683 ; C23C16/455 ; C23C16/50 ; C23C14/22
Abstract:
An article comprises a plasma resistant ceramic material comprising Y2O3 at a concentration of approximately 30 molar % to approximately 60 molar %, Er2O3 at a concentration of above 30 molar % to approximately 60 molar %, and at least one of ZrO2, Gd2O3 or SiO2 at a concentration of over 0 molar % to approximately 30 molar %.
Public/Granted literature
- US20190263722A1 RARE-EARTH OXIDE BASED CHAMBER MATERIAL Public/Granted day:2019-08-29
Information query
