Invention Grant
- Patent Title: Device and method for measuring a surface topography, and calibration method
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Application No.: US16154670Application Date: 2018-10-08
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Publication No.: US10935372B2Publication Date: 2021-03-02
- Inventor: Lars Omlor , Carsten Glasenapp
- Applicant: Carl Zeiss AG
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss AG
- Current Assignee: Carl Zeiss AG
- Current Assignee Address: DE Oberkochen
- Agency: Thrive IP®
- Agent Georg M. Hasselmann
- Priority: DE102016106535.8 20160408
- Main IPC: G01B11/25
- IPC: G01B11/25 ; G01M11/02 ; G03B3/04

Abstract:
A method and a device for measuring the topography and/or the gradients and/or the curvature of an optically active surface of an object are disclosed. The device allows the object to be arranged in a receiving region with a contact surface for contact with the object. Inside the device, there is a plurality of point light sources that provide light that is reflected at the surface to be measured of an object arranged in the receiving region. The device includes at least one camera with an objective assembly and an image sensor for detecting a brightness distribution which is produced on a light sensor by the light of the point light sources reflected at the surface to be measured.
Public/Granted literature
- US20190049238A1 DEVICE AND METHOD FOR MEASURING A SURFACE TOPOGRAPHY, AND CALIBRATION METHOD Public/Granted day:2019-02-14
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