Invention Grant
- Patent Title: Stress sensor for monitoring the health state of fabricated structures such as constructions, buildings, infrastructures and the like
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Application No.: US15957819Application Date: 2018-04-19
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Publication No.: US10935444B2Publication Date: 2021-03-02
- Inventor: Elio Guidetti , Mohammad Abbasi Gavarti , Daniele Caltabiano , Gabriele Bertagnoli
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102017000044301 20170421
- Main IPC: G01L1/18
- IPC: G01L1/18 ; G01L25/00 ; G01L5/162 ; G01M5/00
Abstract:
A stress sensor formed by a membrane plate; a first bonding region arranged on top of the membrane plate; a cover plate arranged on top of the first bonding region, the first bonding region bonding the membrane plate to the cover plate; three-dimensional piezoresistive elements extending across the membrane plate that are embedded in the bonding layer; and planar piezoresistive elements that extend across the membrane plate and are surrounded by and separated from the bonding layer.
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