- Patent Title: Gas sensing method with chemical and thermal conductivity sensing
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Application No.: US16786361Application Date: 2020-02-10
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Publication No.: US10935509B2Publication Date: 2021-03-02
- Inventor: Fang Liu , Peter Hartwell , Martin Lim , Yushi Yang
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: G01N27/04
- IPC: G01N27/04 ; G01N27/18 ; G01N27/12 ; G01N33/00

Abstract:
The present invention relates to methods for detecting gases in an environment using chemical and thermal sensing. In one embodiment, a method includes exposing a chemiresistor embedded within a sensor pixel to a gas in an environment; setting a heater embedded within the sensor pixel to a sensing temperature, the sensing temperature being greater than room temperature; measuring an electrical resistance of the chemiresistor in response to setting the heater to the sensing temperature; and in response to a difference between the electrical resistance of the chemiresistor and a reference electrical resistance being less than a threshold, supplying a fixed power input to the heater embedded within the sensor pixel and measuring a temperature of the sensor pixel relative to a reference temperature.
Public/Granted literature
- US20200173946A1 GAS SENSING METHOD WITH CHEMICAL AND THERMAL CONDUCTIVITY SENSING Public/Granted day:2020-06-04
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