- Patent Title: Ultra-high sensitivity dual-gated biosensor based on MOS transistor
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Application No.: US16482266Application Date: 2018-11-01
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Publication No.: US10935551B2Publication Date: 2021-03-02
- Inventor: Tong Wang , Yanfeng Jiang , Ye Zhang , Hang Chen , Jialin Sun , Hang Li
- Applicant: Wuxi People's Hospital
- Applicant Address: CN Wuxi
- Assignee: Wuxi People's Hospital
- Current Assignee: Wuxi People's Hospital
- Current Assignee Address: CN Wuxi
- Agency: Bayramoglu Law Offices LLC
- Priority: CN201711157594.7 20171120
- International Application: PCT/CN2018/113289 WO 20181101
- International Announcement: WO2019/096011 WO 20190523
- Main IPC: G01N33/551
- IPC: G01N33/551 ; G01N33/574 ; G01N27/22 ; H01L21/02 ; H01L21/027 ; H01L21/265 ; H01L21/266 ; H01L21/28 ; H01L21/285 ; H01L21/3065 ; H01L21/308 ; G01N33/543

Abstract:
An ultra-high sensitivity dual-gated biosensor based on an MOS transistor, which is applicable to detection of a series of early tumors. The sensor is prepared and processed by using SOI wafers, and a unique dual-gated structure is realized by ion implantation technique. The sensor is prepared by an ultraviolet lithography combined with an NLD etching method, realizing trace, instant and marker-free detection of tumor markers. The method detects a change in capacitance in the channel during binding of antigen antibodies. The detection method involved in the invention is more stable and strong in anti-interference, can meet the demands in the aspect of detection range and sensitivity, and especially has extremely outstanding detection sensitivity, and can detect a sample with a lowest concentration in the range of 1 fg/ml˜1 ng/ml.
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