Invention Grant
- Patent Title: Physical quantity sensor, electronic device, and vehicle
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Application No.: US16118960Application Date: 2018-08-31
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Publication No.: US10935567B2Publication Date: 2021-03-02
- Inventor: Shuichi Kawano
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2017-168289 20170901
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01C19/00 ; G01P15/08 ; G01C19/5705

Abstract:
In a physical quantity sensor, wirings provided on a projection and a bonding pad form a silicide layer and are electrically connected. The wirings are multilayered films. A noble metal layer covers the projection and contacts the bonding pad to form the silicide layer. A metal layer extends between the noble metal layer and a base substrate. The metal layer, the noble metal layer, an adhesion layer, and an insulating layer are stacked in this order from the base substrate in all areas except for atop the projection.
Public/Granted literature
- US20190072580A1 Physical Quantity Sensor, Electronic Device, And Vehicle Public/Granted day:2019-03-07
Information query
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