Invention Grant
- Patent Title: Freeform distortion correction
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Application No.: US15595497Application Date: 2017-05-15
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Publication No.: US10935892B2Publication Date: 2021-03-02
- Inventor: Tamer Coskun , Thomas L. Laidig , Jang Fung Chen
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
Methods and systems are provided that, in some embodiments, print and process a layer. The layer can be on a wafer or on an application panel. Thereafter, locations of the features that were actually printed and processed are measured. Based upon differences between the measured differences and designed locations for those features at least one distortion model is created. Each distortion model is inverted to create a corresponding correction model. When there are multiple sections, a distortion model and a correction model can be created for each section. Multiple correction models can be combined to create a global correction model.
Public/Granted literature
- US20180329310A1 FREEFORM DISTORTION CORRECTION Public/Granted day:2018-11-15
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