Invention Grant
- Patent Title: Automatic optical inspection method
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Application No.: US16050261Application Date: 2018-07-31
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Publication No.: US10937151B2Publication Date: 2021-03-02
- Inventor: Fan Wang , Hailiang Lu , Kai Zhang
- Applicant: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Applicant Address: CN Shanghai
- Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Current Assignee Address: CN Shanghai
- Agency: Muncy, Geissler, Olds & Lowe, PC
- Priority: CN201710653164.8 20170802
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G06T7/00 ; G01N21/88 ; G01N21/95

Abstract:
An automatic optical inspection (AOI) method for inspecting defects on a surface of an object is provided. The method includes: providing at least two different illumination systems; acquiring, by at least one detector, at least two pieces of image information of the object, each piece of image information being acquired under illumination of a corresponding one of the illumination systems; obtaining at least two pieces of surface defect information of the object by analyzing the acquired at least two pieces of image information using a computer and storing at least one of the obtained at least two pieces of surface defect information by the computer; and combining, by the computer, all of the at least two pieces of surface defect information to de-duplicate the at least two pieces of surface defect information and obtain a piece of combined surface defect information.
Public/Granted literature
- US20190043182A1 AUTOMATIC OPTICAL INSPECTION METHOD Public/Granted day:2019-02-07
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