Invention Grant
- Patent Title: Micro device transferring apparatus and micro device transferring method
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Application No.: US16553885Application Date: 2019-08-28
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Publication No.: US10937559B2Publication Date: 2021-03-02
- Inventor: Fei Wang , Huijuan Wang , Wanxian Xu , Xuan Liang , Meili Wang
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Arent Fox LLP
- Agent Michael Fainberg
- Priority: CN201910175804.8 20190308
- Main IPC: G21K1/00
- IPC: G21K1/00 ; G02B1/00 ; H01L23/00 ; H01L21/67 ; H01L21/68

Abstract:
A micro device transferring apparatus and a micro device transferring method are provided. The micro device transferring apparatus for moving a micro device fixed on an original substrate to a target substrate includes: a stripper on a side of the original substrate away from the micro device, configured to strip the micro device off the original substrate, and an optical tweezer configured to tweeze the micro device from a side of the original substrate provided with the micro device, wherein an accommodating space for accommodating the micro device and the original substrate is between the stripper and the optical tweezer.
Public/Granted literature
- US20200286639A1 MICRO DEVICE TRANSFERRING APPARATUS AND MICRO DEVICE TRANSFERRING METHOD Public/Granted day:2020-09-10
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