- Patent Title: Determining susceptor service life in a plasma processing chamber
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Application No.: US15692996Application Date: 2017-08-31
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Publication No.: US10937637B2Publication Date: 2021-03-02
- Inventor: Ilias Iliopoulos
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; G05B23/02 ; H01L21/687 ; H01J37/244 ; H01L21/67 ; G01N21/88
Abstract:
In one embodiment of the invention, a method for predicting a susceptor's service life in a processing chamber is disclosed. The method begins by creating virtual sensors in a processing chamber having a susceptor. The virtual sensors monitor one or more parameters on the susceptor and the age of the susceptor is tracked throughout the susceptor's life in the processing chamber with the virtual sensors.
Public/Granted literature
- US20190066986A1 DETERMINING SUSCEPTOR SERVICE LIFE IN A PLASMA PROCESSING CHAMBER Public/Granted day:2019-02-28
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