Invention Grant
- Patent Title: Conveyor inspection system, substrate rotator, and test system having the same
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Application No.: US16712969Application Date: 2019-12-12
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Publication No.: US10937683B1Publication Date: 2021-03-02
- Inventor: Asaf Schlezinger , Markus J. Stopper
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/67 ; H01L21/66 ; H01L21/677
Abstract:
Embodiments disclosed herein generally relate to a conveyor inspection system and a method of sorting a substrate. The conveyor inspection system includes a moveable conveyor and a rapid conveyor. The moveable conveyor is configured to transfer undesired substrates to the rapid conveyor. The method includes determining that the substrate is undesirable for entry into a modular inspection unit, transferring the substrate to a rapid conveyor in response to determining that the substrate is undesirable for entry into the modular inspection unit, and transporting the substrate on the rapid conveyor. The conveyor inspection system and method remove substrates from the test system upon first entering the test system, which reduces time wasted in analyzing undesired substrates that would be discarded.
Information query
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