Invention Grant
- Patent Title: Chamferless via structures
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Application No.: US16503706Application Date: 2019-07-05
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Publication No.: US10937694B2Publication Date: 2021-03-02
- Inventor: Mark L. Lenhardt , Frank W. Mont , Brown C. Peethala , Shariq Siddiqui , Jessica P. Striss , Douglas M. Trickett
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Calderon Safran Cole, P.C.
- Agent L. Jeffrey Kelly; Andrew M. Calderon
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L21/311

Abstract:
Chamferless via structures and methods of manufacture are provided. The method includes: forming at least one non-self-aligned via within at least dielectric material; plugging the at least one non-self-aligned via with material; forming a protective sacrificial mask over the material which plugs the at least one non-self-aligned via, after a recessing process; forming at least one trench within the dielectric material, with the protective sacrificial mask protecting the material during the trench formation; removing the protective sacrificial mask and the material within the at least one non-self-aligned via to form a wiring via; and filling the wiring via and the at least one trench with conductive material.
Public/Granted literature
- US20190333814A1 CHAMFERLESS VIA STRUCTURES Public/Granted day:2019-10-31
Information query
IPC分类: