Invention Grant
- Patent Title: Bump structure manufacturing method
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Application No.: US16310976Application Date: 2017-12-28
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Publication No.: US10937751B2Publication Date: 2021-03-02
- Inventor: Jin Kuk Lee
- Applicant: LBSEMICON CO., LTD.
- Applicant Address: KR Gyeonggi-do
- Assignee: LBSEMICON CO., LTD.
- Current Assignee: LBSEMICON CO., LTD.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Mayer & Williams PC
- Agent Stuart H. Mayer
- Priority: KR10-2017-0028343 20170306
- International Application: PCT/KR2017/015668 WO 20171228
- International Announcement: WO2018/164359 WO 20180913
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/304 ; H01L21/683 ; H01L21/78

Abstract:
Provided is a method of manufacturing a bump structure, the method including a first step for preparing a wafer including a plurality of chips each including a die pad, an under bump metal (UBM) layer on the die pad, and a bump pattern on the UBM layer, a second step for attaching a backgrinding film to an upper surface of the wafer, a third step for grinding a rear surface of the wafer by a certain thickness, a fourth step for forming a flexible material layer on a second rear surface of the wafer after being ground, and then attaching dicing tape including a ring frame, to the flexible material layer, a fifth step for removing the backgrinding film and then performing a curing process to harden the flexible material layer, and a sixth step for performing a dicing process to cut the plurality of chips into individual chips.
Public/Granted literature
- US20200266163A1 BUMP STRUCTURE MANUFACTURING METHOD Public/Granted day:2020-08-20
Information query
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